1. Anwendungen
  2. Anwendungen

Anwendungen

Anwendungen

3D Mikrostrukturen

Thermischer Reflow

UV Lithographie

Grauton Lithographie

Laser-Direct-Writing Lithographie

Leuchtdioden (LED)

ma-P 1200
Positiv-Photoresiste
Details ‣
mr-I 7000R Serie
Nanoimprint-Resiste
Details ‣
mr-I 8000R Serie
Nanoimprint-Resiste
Details ‣
SIPOL series
Nanoimprint-Resiste
Details ‣
mr-I 9000M series
Nanoimprint-Resiste
Details ‣
mr-NIL 6000E series
Nanoimprint-Resiste
Details ‣
ma-N 400 & ma-N 1400 series
Negativ-Photoresiste
Details ‣
UV-curable liquid silicone rubber / UV-PDMS
Nanoimprint-Resiste
Details ‣
mr-NIL210 series
Nanoimprint-Resiste
Details ‣

Halbleiter-Bauelemente

ma-P 1200
Positiv-Photoresiste
Details ‣
ma-N 2400 & mr-EBL 6000 series
Negativ-Photoresiste
Details ‣
mr-I 9000M series
Nanoimprint-Resiste
Details ‣
mr-NIL 6000E series
Nanoimprint-Resiste
Details ‣
mr-UVCur21 series
Nanoimprint-Resiste
Details ‣
ma-N 400 & ma-N 1400 series
Negativ-Photoresiste
Details ‣
mr-NIL210 series
Nanoimprint-Resiste
Details ‣

Trockenätzen (Ätzmaskierung für Halbleiter und Metalle)

Galvanoformen

High-Aspect-Ratio Strukturen

Zwei-Photonen-Absorption Lithographie

Nano- und Mikroelektronik

ma-N 2400 & mr-EBL 6000 series
Negativ-Photoresiste
Details ‣
mr-I 9000M series
Nanoimprint-Resiste
Details ‣
mr-NIL 6000E series
Nanoimprint-Resiste
Details ‣
mr-UVCur21 series
Nanoimprint-Resiste
Details ‣
UV-curable liquid silicone rubber / UV-PDMS
Nanoimprint-Resiste
Details ‣
mr-NIL210 series
Nanoimprint-Resiste
Details ‣
mr-UVCur26SF
Nanoimprint-Resiste
Details ‣
mr-PosEBR series
Positiv-Photoresiste
Details ‣

Wire-Grid Polarisatoren

Deep-UV Lithographie

ma-N 2400 & mr-EBL 6000 series
Negativ-Photoresiste
Details ‣

Elektronenstrahl-Lithographie

ma-N 2400 & mr-EBL 6000 series
Negativ-Photoresiste
Details ‣
mr-PosEBR series
Positiv-Photoresiste
Details ‣

Optische Wellenleiter

EpoCore & EpoClad Serien
Negativ-Photoresiste
Details ‣
OrmoCore and OrmoClad
Hybrid Polymers
Details ‣

Diffraktive optische Elemente (DOE)

Organische Elektronik

Nanoimprint Lithographie (thermisch) für Strukturübertragung

PVD-Verfahren (physical vapour deposition)

mr-I 7000R Serie
Nanoimprint-Resiste
Details ‣
mr-I 9000M series
Nanoimprint-Resiste
Details ‣
mr-NIL 6000E series
Nanoimprint-Resiste
Details ‣
mr-UVCur21 series
Nanoimprint-Resiste
Details ‣
ma-N 400 & ma-N 1400 series
Negativ-Photoresiste
Details ‣

Strukturierte Saphir Substrate

Lab-on-a-Chip

mr-I T85 series
Nanoimprint-Resiste
Details ‣
OrmoComp®
Hybrid Polymers
Details ‣
OrmoClear® Series
Hybrid Polymers
Details ‣
OrmoStamp®
Hybrid Polymers
Details ‣
OrmoStamp®
Nanoimprint-Resiste
Details ‣
UV-curable liquid silicone rubber / UV-PDMS
Nanoimprint-Resiste
Details ‣
OrmoClear®FX
Hybrid Polymers
Details ‣

Mikrofluidik und Mikro-Bio-Fluidik

mr-I T85 series
Nanoimprint-Resiste
Details ‣
OrmoComp®
Hybrid Polymers
Details ‣
OrmoClear® Series
Hybrid Polymers
Details ‣
OrmoStamp®
Hybrid Polymers
Details ‣
OrmoStamp®
Nanoimprint-Resiste
Details ‣
UV-curable liquid silicone rubber / UV-PDMS
Nanoimprint-Resiste
Details ‣
OrmoClear®FX
Hybrid Polymers
Details ‣

Nanoimprint Lithographie (thermisch) für Permanentanwendung

Nanoimprint Lithographie – kombinierte thermische und UV-NIL

mr-NIL 6000E series
Nanoimprint-Resiste
Details ‣

Nanoimprint Lithographie (UV- oder Photo-NIL) für Strukturübertragung

Rolle-zu-Rolle Verfahren

Wafer-Level Optiken

Nanoimprint Lithographie (UV- oder Photo-NIL) für Permanentanwendung

UV Replikation

OrmoComp®
Hybrid Polymers
Details ‣
OrmoClear® Series
Hybrid Polymers
Details ‣
OrmoCore and OrmoClad
Hybrid Polymers
Details ‣
OrmoStamp®
Hybrid Polymers
Details ‣
OrmoStamp®
Nanoimprint-Resiste
Details ‣
UV-curable liquid silicone rubber / UV-PDMS
Nanoimprint-Resiste
Details ‣
OrmoClear®FX
Hybrid Polymers
Details ‣

Inkjet-Printing

Nanoimprint Arbeitsstempel

OrmoStamp®
Hybrid Polymers
Details ‣
OrmoStamp®
Nanoimprint-Resiste
Details ‣
UV-curable liquid silicone rubber / UV-PDMS
Nanoimprint-Resiste
Details ‣

Lift-off Strukturierung

ma-N 400 & ma-N 1400 series
Negativ-Photoresiste
Details ‣